LASER MACHINE
INSPECTION MACHINE
THIN FILM DEPOSITION
Thin film deposition equipment is used to form thin film layers on the surface of a substrate, with thickness typically ranging from nanometers to micrometers. These devices utilize physical or chemical methods to precisely deposit materials onto target surfaces, creating films with specific functions such as optical, electrical, or mechanical properties. Thin film deposition equipment is widely applied in industries like electronics, semiconductors, optics, energy, and healthcare.
PROCESSING STEPS
1. Substrate Preparation
2. Material Preparation
3. Method Selection
(PVD/CVD)
4. Deposition Process
5. Post-Processing
6. Quality Inspection
CHARACTERISTICS
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High Precision: Film thickness and uniformity can be controlled at the nanometer level.
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Versatility: Capable of depositing various materials to form films with different properties (conductive, insulating, optical, etc.).
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Customizability: Process parameters can be adjusted to meet specific functional requirements.
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Environmental Requirements: Some methods (e.g., CVD) may have environmental impacts, requiring strict control of gas emissions.
APPLICATIONS
Semiconductor
Chip manufacturing.
Example: PVD equipment deposits conductive films for transistor interconnects.
Medical
Biocompatible films for implants or medical devices. Example: PVD deposits titanium coatings on implants.
Optics
Anti-reflective coatings and enhancement films.
Example: CVD deposits silicon oxide films on optical lenses.
Display
OLED and LED displays.
Example: Evaporation equipment deposits organic emissive layers in OLED screens.
Solar Energy
Production of thin-film solar cells.
Example: CVD deposits amorphous silicon films to improve photovoltaic efficiency.
Specifications
Line Count /线数 （Line/inch） | Mesh Spacing /网眼间距 （μm） | Maximum Sheet Size /最大薄片尺寸 （mm） | Opening Accuracy Guarantee Area开口部精度保证区域 | Opening Accuracy Guarantee Area开口部精度保证区域 | Min ~ Max Opening Size /最小～最大 开口尺寸 （μm） |
|---|---|---|---|---|---|
150 | 169.3 | 180 | ±3 | ≦φ100 | 23～150 |
114 | 222.8 | 240 | ±3 | ≦φ125 | 30～200 |
100 | 254 | 180 | ±3 | ≦φ100 | 40～231 |
60 | 423.3 | 180 | ±3 | ≦φ100 | 80～396 |
250 | 101.6 | 180 | ±3 | ≦φ100 | 13～82 |
325 | 78.2 | 380 | ±4 | ≦φ300 | 8～62 |
325 | 78.2 | 380 | ±2 | ≦φ180 | 8～62 |
333 | 76.3 | 220 | ±3 | ≦φ100 | 6～60 |
400 | 63.5 | 380 | ±2 | ≦φ150 | 5～47 |
400 | 63.5 | 380 | ±4 | ≦φ300 | 5～47 |
400 | 63.5 | 180 | ±2 | ≦φ100 | 5～47 |
500 | 50.8 | 240 | ±1 | ≦φ125 | 4～35 |
500 | 50.8 | 380 | ±1 | ≦φ150 | 4～35 |
500 | 50.8 | 180 | ±3 | ≦φ300 | 4～35 |
500 | 50.8 | 180 | ±1 | ≦φ75 | 4～35 |
640 | 39.7 | 380 | ±3 | ≦φ300 | 3～28 |
640 | 39.7 | 380 | ±1 | ≦φ150 | 3～28 |
750 | 33.9 | 380 | ±3 | ≦φ300 | 2～22 |
750 | 33.9 | 380 | ±1 | ≦φ150 | 2～22 |
750 | 33.9 | 240 | ±1 | ≦φ125 | 2～22 |
876 | 29 | 380 | ±3 | ≦φ300 | 2～20 |
875 | 29 | 240 | ±1 | ≦φ125 | 2～19 |
876 | 29 | 380 | ±1 | ≦φ150 | 2～20 |
2540 | 10 | 250×300 | ±1 | ≦100×150* | 2～5* |
2000 | 12.7 | 250×300 | ±1 | ≦100×150* | 2～6* |
1500 | 16.9 | 180 | ±1 | ≦φ75 | 2～8 |
1500 | 16.9 | 240 | ±1 | ≦φ125 | 2～5 |
1000 | 25.4 | 240 | ±1 | ≦φ125 | 2～12 |
1000 | 25.4 | 380 | ±1 | ≦φ150 | 2～16 |
1000 | 25.4 | 380 | ±3 | ≦φ300 | 2～16 |
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